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Controlling the Diameter Size of Carbon Nanofilaments by the Cyclic on/off Modulation of C2H2/H2/SF6 Flow in a Thermal Chemical Vapor Deposition System

7 ํŽ˜์ด์งฟ’
๊ธฐํƒ€ํŒŒ์ผ
์ตœ์ดˆ๋“ฑ๋ก์ผ 2025.04.15 ์ตœ์ข…์ ฟ’์ž‘์ผ 2009.11
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Controlling the Diameter Size of Carbon Nanofilaments by the Cyclic on/off Modulation of C2H2/H2/SF6 Flow in a Thermal Chemical Vapor Deposition System
  • ๋ฏธ๋้ฉ๋ณด๊ธฐ

    ์„œ์่ง์ •๋ต–

    ยท ๋ฐœํ–‰๊ธฐ๊ด€ : ํ•œ๊ตญ์ง„๊ณตํ•™ํšŒ
    ยท ์ˆ˜๋ก์ง€ ์ •๋ณด : Applied Science and Convergence Technology / 18๊ถŒ / 6ํ˜ธ / 481 ~ 487ํŽ˜์ด์งฟ’
    ยท ์ €์ž๋ช… : ๊น€์„ฑํ›ˆ, ๊น€๊ด‘๋•

    ์ดˆ๋ก

    To control the diameter size of the carbon nanofilaments (CNFs), SF6 was incorporated in the source gases (C2H2/H2) during the initial deposition stage. The source gases and SF6 were manipulated as the cyclic on/off modulation of C2H2/H2/SF6 flow in a thermal chemical vapor deposition system. The characteristics of the CNFs formation on the substrate were investigated according to the different cyclic modulation processes and the substrate temperatures. By SF6 + H2 flow injection during the cycling etching interval time, the diameter size of CNFs was extremely decreased. The cause for the decrease in the diameter size of the individual CNFs by the cyclic on/off modulation process of C2H2/H2/SF6 flow was discussed in association with the slightly enhanced etching ability by the incorporation of SF6.

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    ยท ์—†์Œ
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