BRONZE
BRONZE ??? ??? ??

???_??_??

????
88 ???
?????
????? 2011.01.25 ????? 1997.01
88P ????
???_??_??
  • ????

    ??

    ????

    ??

    Chapter 1
    Basic Principle of Vacuum

    Chapter 2
    Vacuum Pump

    Chapter 3
    Gauge

    Chapter 4
    Materials & Hardware

    Chapter 5
    Vacuum System

    Chapter 6
    Leak Detection

    ????

    ?? (Vacuum)
    ??? ???? ????
    1?? : ?????? ???? ????
    ????? ??? ???? ??
    ?? ?? = 1.013X105 N/m2 = 10130 Pascal = 101.3hpascal= 1013mbar
    ??? ??? ?? ? ??? ?? ??
    1??? ???? ???? ???
    (? ?? = 1 g/cc = 103kg/m3 )
    1ATM = ¦Ñ g h = (103kg/m3 )(9.8m/s2)h
    = 1.013 x 105 Pascal
    1??? ???? ????????
    Hg(??) ? ??? ?? ? 13?
    1??? ??? ??? ?? = 760mm
    1?? = 760mmHg = 760 Torr
    1micron = 1micrometer Hg =1/1000 torr
    ??? ?
    ?????? 13pd ?? ???? ?????
    (???)
    ?????? ??? ? 700 Torr
    ?, ???? ???? ? ??!!
    13pd
    ¨P6kg
    1??
    1??
    P??
    ??
    100cm2
    ??? ??
    Mean free path (¦Ë)
    ?? ???? ???? ??
    Ex) 1 mTorr ? ?? ¦Ë¨P5cm
    10-5 Torr ? ?? ¦Ë¨P5mm
    ??? ??

    <? ?>

    MFC
    10sccm
    Pumping
    Chamber
    base pressure
    Ar gas
    2. Use MFC
    MFC
    0sccm
    Pumping
    Chamber
    base pressure
    Ar gas
    Conductance Formulae
    1. In the viscous flow region
    D : diameter , L : length of the tube (cm)
    2. In the molecular-flow region
    Independent of pressure
    of tube of circular cross section (air at 20¡æ)
    Useful for determining the dimesnions of roughing and forepump lines.
    Useful in determining the dimesnions of a high-vacuum chamber and the size of the tube leading from the chamber to a high-vacuum pump.
    ulations
    Valves
    of Throttle Valves
    23
    24
    ?????: ??? ??? ? ?? ?? ???? ???? ???? ????? ????? ??? ?? ????? ??? ? ??.
    25
    ????? : ?? ????? ??? ? ?? ????, ??? ??? ?? ?? ????? ??? ?? ????? ?? ?? ????.

    ????

    ¡¤ ??
  • ????

      Ai ??
      ?????? ??? ?? ?? ??? ??? ??? ? ???? ?? ??? ?? ??? ?????. ?? ?? ? ???? ??? ? ?????.
    • ??????? ??? ??? ???

      ????? FAQ ???

      ? ?????

      • ??? ?? ? ??? ???? ??? ?????? ???? ???, ?? ?? ? ??? ???? ?? ?? ??? ?? ????? ????.
        ?? ? ??? ??? ??? ??, ?? ?????? ???? ????.
        ?????, ???? ? ?? ?? ?? ? ????? ????? ????? ??? ??? ????.
      • ?????? ???? ??? ??? ???? ???? ??? ???? ???, ??? 4?? ???? ??? ? ?????? ????.
        ???? ???? ??? ?? ??? ?? ?? ???
        ??? ????? ??? ?? ??? ????? ?? ?????? ?? ???? ?? ?? ?? ??? 70% ?? ??? ???? ?? (???? ??? ? ?? ?? ???) ???? ?? ???, ????, ??, ?? ?? ??? ??? ?? ??? ??? ?? ??? ??? ???? ?? ??

    ???? ??? ?????

    ?? ?? ??? ???? ???!
    ?? ???
    ??? ???
    ?? ??? ????? EasyAI
    ?????. ?????? ??? ?? ??? ???? ???? ??? ????? EasyAI ???.
    ?? ??? ?? ??? ??????.
    - ??? ???? ???? ?????? ?? ??? ????.
    - ??? ???? ?? ??? ??? ????.
    - ????? ?? ??? ???? 1? ?? ?? ? ????. ?? ?? ??? ???!
    ?? ???? ??? ???.
    - ???? ??? ????? ??? ??
    - ???? ??? ??? ??? ???? ??? ??? ??? ???? ????, ???????? ???? ??? ??? ???? ??? ???? ?????
    - ???? ???
    ?? AI ??? ????
    ???? ???? ??????.
    2025? 06? 16? ???
    AI ??
    ?????. ????? AI ?????. ??? ???????
    3:12 ??