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etching???
dry etch? wet etch
wet etching? ??
wet etching? ??
wet etching? ??
wet etching? ???? ????????
Etching ? ??
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[??]DRY ETCHING
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I. DRY ETCHING 1. ?? ?? ??? ??? ?? ??? ??? lithography? ?? ?? ????? critical? ????. ? ????? ????? ?? ???? ??? ?? ??? ????? ????, ?? ??? ?? ?? ?? ?? ??. 2. Plasma?? 2.1 Plasma?? ????? ?? .. -
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I. ??(Etching)? ?? ??(Etching) ??? ??? ??? ??? ??? ???? ??? ???? ???? ??? ?? ? ??(Photolithography) ?? ??? ????. ??? ??? ??? ?? ???? ??? ???? ?? ??? ?? ??? ??? ??? ??? ?? ??? ??? ? ??? ??? ??? ??? ?..
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♦ Etching of thin films and sometimes the silicon substrate are very common process steps. ♦ Usually selectivity, and directionality are the first order issues...
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Wet and Dry etching Technology
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