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Wet and Dry etching Technology
Wet etching? dry etching? ???? ???? ?? ???? ??? ?????.
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????? 2011.11.27
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2011.10
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Wet etching? dry etching? ???? ???? ?? ???? ??? ?????.
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Title : Wet and Dry etching Technology of Bulk-micromachining
¢ñ. Introduction
¢ò. Etching
1.Etching parameters
2.Wet Etching
3.Dry Etching
¢ó. Differences
¢ô. Summary
References????
¢ñ. Introduction
MEMS(Micro-Electric Mechanical System) is a field of implementation and application of new system that include and combine to manufacture subminiature electric mechanical devices by manufacturing-process for semiconductor.
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¡¤ Applied Physics by E. Chen
¡¤ by Jin-Sung Cheo
¡¤ from Connections by Andrew R.
¡¤ Barron.
¡¤ By Duan, Xuefeng, McGill University
¡¤ [6] By Andreou and J. Wang??
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35WET_ETCHING
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