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1.1 ????? ??
????? ?? 80% ??? ????? ??? 500 ¦¸/sqm ??? ???? ??? ?? ???? LCD ?? ??, OLED ?? ? ?????, ?????, ????, ??? ?? ? ????? ????? ???? ???
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1.3 ????? ??
ITO? ??: ???? ??? ???? ITO? ?? ??? ?? ?? In 2 O 3 ??? Sn? ???? ?? ???(carrier)? ??, ???? ?? ???? ???? ??. ????? ITO ??? In? Sn? ?? ??? ??? ??? ???? 90 : 10?? ???? ??. ITO ????? ?? ?? ????? ??? ??. ¡¼¦Ò=e?¦Ì?N[¦¸?cm]¡½^(-1)??? ¦Ò, e, ¦Ì, N? ?? ?? ???, ??, ???, ???? ?? ????. ?? ?? ITO ????? ?? ????? ??? ??? ? ??? ????. ??? ?? ??? ?? ??? ???? ?? ???? ?????, ????? ?? ???? ??? ????????? ?? ??? ???? ????. ¡¼SnO¡½_2???:¡¼In¡½_2 O_3?¡¼SnO¡½_2? ??? ??? ??? Sn? ?????? ???? ??????? ??? ??? ???? ????.
ZnO? ??: ZnO ? ITO?? ??? ??? ?????? ????? ??? ???? 3.3eV??? ???? ????? ???? ??? ????? ????.????
¡¤ http://rnd.compa.re.kr/cmm/fms/FileDown.do;jsessionid=l0uhpAEyOMZoRjhd6c1Ak92nPKeV3eTMToODPQvvmWPWZvuzMs5VU0whRydKJiwx.was1_servlet_irnd?atchFileId=FILE_000000000014532&fileSn=0FlexibleTouchDisplay??????????_???????(???).pdf
¡¤ https://crpc.kist.re.kr/common/attachfile/attachfileDownload.do?attachNo=000008202? ???????? ????-?????? ???
¡¤ Bel Hadj Tahar R. , Ban T. , Ohya Y. , Takahashi Y (1998) ¡°Tin Doped Indium Oxide Thin Films: Electrical Properties,¡± J. Appl. Phys 83 (5) 2631 - 2645 DOI : 10.1063/1.367025
¡¤ http://www.kpubs.org/article/articleMain.kpubs?articleANo=CJGSB2_2015_v21n4_209Trends of Recycling of Indium-Tin-Oxide (ITO) Target Materials for Transparent Conductive Electrodes (TCEs)-Korean Journal Publishing Service
¡¤ https://www.scienceall.com/%EC%A7%84%EA%B3%B5%ED%8E%8C%ED%94%84vacuum-pump/????? ??????
¡¤ https://m.blog.naver.com/PostView.nhn?blogId=youngdisplay&logNo=221244563265&proxyReferer=https%3A%2F%2Fwww.google.co.kr%2F
¡¤ https://m.blog.naver.com/PostView.nhn?blogId=youngdisplay&logNo=221244563265&proxyReferer=https%3A%2F%2Fwww.google.co.kr%2F
¡¤ http://blog.naver.com/PostView.nhn?blogId=iotsensor&logNo=220299073745 ????? ??
¡¤ https://ko.wikipedia.org/wiki/%EC%8A%A4%ED%8D%BC%ED%84%B0%EB%A7%81????? ??-????
¡¤ https://terms.naver.com/entry.nhn?docId=1159708&cid=40942&categoryId=32227????-????
¡¤ https://www.edmundoptics.co.kr/resources/application-notes/optics/an-introduction-to-optical-coatings/ ?? ?? ??-???? ?????
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???? ???? ??? ?? ??? ?? ?? ??? ??? ????? ??? ?? ??? ????? ?? ?????? ?? ???? ?? ?? ?? ??? 70% ?? ??? ???? ?? (???? ??? ? ?? ?? ???) ???? ?? ???, ????, ??, ?? ?? ??? ??? ?? ??? ??? ?? ??? ??? ???? ?? ??
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PECVD? ?? ???
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PECVD?, Plasma Enhanced Chemical Vapor Deposition? ????, ????? ??? ?????????. ??? ????? ????? ??? ?????? ?? ???. ?? ?? ??? ???, ??? ?????? ????. ??? ?????? ??? ?????? ??? ???? ??? ? ??? ?? ????, ?? ??.. -
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?? ????, ?? ?????(PVD)? ??? ?????? ????? ????? ?????? ??? ??? ???? ??? ? ??? ????? ??? ???? ?? ??? ?? ? ????? ??? ? ??? ??? ???. ?? ?? ??? ?? ??? ?? ??? ??? ???? ????? ??? ????. ?????? ?? ?? ?? ?? ?..
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[????]E-beam Evaporator
5???
1. ??? ??? ??? ?? ??? ????? ???? ?? PVD?? CVD?? ???, ?? PVD?? ??, ????, ????????? ????? ???? ???, ????,???,??? ?? ???? ???? ??. ???? ???? ??? ???? ????? ?? ???? ????, ???? ?????? ???? ??? ??????..
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[??]????, ????, CVD, ????, ????
10???
1. ?? [±w¿Õ, vacuum] ???? ??? ??? ??? ??? ?? ???? ?? ????? ? ? ??. ???? ??? ??? ???? ?? ??? ??? ?? 1/1000(10-3)©LHg ?? ??? ??? ???? ??. ???? ?? ?? ?? ?? ?? ??? ??? ??? ???? ??. ????? ???? 10-2¡«10-5©LH..
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Evaporator ??? ??, ??? ??? ??
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???? ?? ??? ?????? ?? ??? ?? ?? ??????? ?? ?? ??? ?? ??? ????? ???? ??? ????? ???? ????? ??? ??? ????? ??? ?? ????? ?????. ????|??? gangnarunet http://blog.naver.com/gangnarunet/40065468688 E-..
?? ??? ????? EasyAI
¡°EasyAI ? ??? ?? ??? ???? ?? ? ????"
