[?????]??? ????

3. Photolithography
1) PR Coating
PR Coating?? ?? ???(Dispense) Liquid(??) PR? ?? ???? ???? ??? ?? ?? ??? ?? ??? ???? ? ?????? Baking?? PR? ??(Solvent)? ??????? ???? ??? ??? ???.
PR(Photo Resist)?? ?? ???? ?? ???(??: Photo Exposure) ??? ?? ??? ?? ??? ???(Photosensitive Polymer)??. ?? ???? ?? PR? ?? ??? ?? ??? ? ??? ??? Polymer ??? ????? ?? ? ??? ???? ?? ????.
????? ??? ??? Polymer ????? ???? PR? Positive PR?? ?? ? ??? ??? Negative PR?? ??. ?? ? ??? ??? ??(Liquid) PR? Film Type?? ????. ???? Thin Film Process??? ???(Sensitivity, Contrast ?)? ????? ?? AZ ??? Positive Liquid PR? ????. ??? ??? ??, ?? ?? Cyan Type Gold Plating ??? ??, Ca(Chemical Amplification; ????) Type? Negative PR? ????? ??. Thin Film Hic ????? Resistor Patterning ??? Positive PR?, ?? ???? Negative PR? ????. ?? Liquid Type? ?? PR? ?? Film Type? Dry Film? ????? ?? ? ?? Spin Coating ?? Laminating ??? ?? PR? Coating ??.
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2) Exposure(??)
???? Photo Mask? ?? ??? ??? ?? ??(ÕÕÉä)???? Mask?? ??? ???? ??(Pattern)? Coating? PR? ??(ÞDŒ‘)?? ??? ???. Mask? Pattern? ?? Cr ??? ???? ??? Cr Pattern ?? ??? ?? ???? PR? ????? ??? Cr? ?? ??? ???? PR? ??????? Coating? PR? ???? ??? ?????.
PR? ??? ?? Mask ?? Negative ?? Positive? ???? Positive PR? Positive Mask? ????? Negative PR? Negative Mask? ???? PR?? ??(Original Image)?, ? ?? ???? ??(Reverse Image)? ????.
?????? Mask Aligner?? ?? ????? ?????, Aligner?? ??? ??? ???? ??? ??? ???? ???? ?? ???? ????.
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3) Develop(??)
???? ?? ??? ?? ????? ??? ??? ?? ??? PR? ???